E-O probe with FOP and voltage detecting apparatus using the E-O

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

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324 96, 359257, 385126, G01R 3128, G01R 1900, G02B 622, G02F 103

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active

055857353

ABSTRACT:
An E-O probe for a two-dimentional voltage detecting apparatus using a fiber optic plate is provided. The fiber optic plate has a bottom face facing a measured object and a bundle of a plurality of cores separated from one another by cladding electro-optic material is attached to an end of each core at said bottom face side. A reflecting surface is provided on the bottom face side of the fiber optic plate for reflecting light back toward the side of the fiber optic plate opposite said bottom face. The refractive index of said electro-optic material varies in response to the intensity of an electric field applied to the electro-optic material. A two-dimentional voltage detecting apparatus using the E-O probe is further provided which has a high spatial resolution.

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Henley et al, "A High Speed Flat Panel In-Process Test System for TFT Array Using Electro-Optic Effects", IEICE Trans. Electronics, vol. E76-C, No. 1, Jan. 1993, pp. 64-67.

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