Electricity: motive power systems – Positional servo systems
Reexamination Certificate
2007-08-07
2007-08-07
Duda, Rina (Department: 2837)
Electricity: motive power systems
Positional servo systems
C318S432000, C318S114000, C310S012060
Reexamination Certificate
active
10819041
ABSTRACT:
A stage assembly (220) for moving a device (200) includes a stage (208), and actuator pair (226) and a control system (224). The actuator pair (226) includes a first actuator (228) that is coupled to the stage (208). The first actuator (228) has a first E core (236) and a first I core (240) that is spaced apart a first gap (g1) from the first E core (236). The control system (224) directs current to the first actuator (228) to move the stage (208). In one embodiment, the amount of current directed to the first actuator (228) is determined utilizing a first parameter (a) that is added to the first gap (g1). The value of the first parameter (a) is determined by experimental testing. Additionally, the amount of current directed to the first actuator (228) can be determined utilizing a second parameter (b) that is added to the first gap (g1). The value of the second parameter (b) is determined by experimental testing.
REFERENCES:
patent: 5157296 (1992-10-01), Trumper
patent: 5196754 (1993-03-01), Berthold et al.
patent: 5294854 (1994-03-01), Trumper
patent: 5699621 (1997-12-01), Trumper et al.
patent: 6069417 (2000-05-01), Yuan et al.
patent: 6130517 (2000-10-01), Yuan et al.
patent: 6472777 (2002-10-01), Teng et al.
patent: 6750625 (2004-06-01), Binnard et al.
patent: 7034474 (2006-04-01), Yang et al.
U.S. Appl. No. 09/139,954 by Teng et al., application filed Sep. 25, 2998.
U.S. Appl. No. 09/139,954, filed Aug. 25, 1998, Teng et al.
Chang Ping-Wei
Hirano Kazuhiro
Teng Tim
Yang Pai-Hsueh
Yuan Bausan
Broder James P.
Duda Rina
Nikon Corporation
Roeder Steven G.
LandOfFree
E/I core actuator commutation formula and control method does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with E/I core actuator commutation formula and control method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and E/I core actuator commutation formula and control method will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3887019