E/I core actuator commutation formula and control method

Electricity: motive power systems – Positional servo systems

Reexamination Certificate

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Details

C318S432000, C318S114000, C310S012060

Reexamination Certificate

active

10819041

ABSTRACT:
A stage assembly (220) for moving a device (200) includes a stage (208), and actuator pair (226) and a control system (224). The actuator pair (226) includes a first actuator (228) that is coupled to the stage (208). The first actuator (228) has a first E core (236) and a first I core (240) that is spaced apart a first gap (g1) from the first E core (236). The control system (224) directs current to the first actuator (228) to move the stage (208). In one embodiment, the amount of current directed to the first actuator (228) is determined utilizing a first parameter (a) that is added to the first gap (g1). The value of the first parameter (a) is determined by experimental testing. Additionally, the amount of current directed to the first actuator (228) can be determined utilizing a second parameter (b) that is added to the first gap (g1). The value of the second parameter (b) is determined by experimental testing.

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U.S. Appl. No. 09/139,954, filed Aug. 25, 1998, Teng et al.

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