E-beam voltage potential circuit performance library

Details E-beam voltage potential circuit performance library E-beam voltage potential circuit performance library

2005-10-04

2005-10-04

Karlsen, Ernest (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S765010

Reexamination Certificate

active

06952106

ABSTRACT:
Point-by-point image contrast values are generated from secondary electron collection during unbiased electron or ion beam bombardment of an integrated circuit (IC) in a vacuum environment to quantify the physical and electrical integrity of connections within the device. These values are stored for each type of circuit cell under standard conditions to quantify and check the performance of individual cells on the device.

REFERENCES:
patent: 6091249 (2000-07-01), Talbot et al.
patent: 6326798 (2001-12-01), Kuribara
patent: 6344750 (2002-02-01), Lo et al.
patent: 6586952 (2003-07-01), Nozoe et al.
patent: 6642726 (2003-11-01), Weiner et al.

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