Photocopying – Projection printing and copying cameras – Illumination systems or details
Patent
1999-09-08
2000-08-01
Metjahic, Safet
Photocopying
Projection printing and copying cameras
Illumination systems or details
355 53, G03B 2772, G03B 2742
Patent
active
060974745
ABSTRACT:
Blades pivotally attached together linked to push rods and inserted into an illumination field, energy or flux. The blades extend longitudinally along the length of a rectangular illumination field or slit used to image a reticle onto a photosensitive substrate. The blades controllably adjust the width of the rectangular illumination field to modify the illumination intensity or energy provided to a photosensitive substrate. The illumination field is scanned across the photosensitive substrate to expose it with the image of a reticle. The blades are dynamically controlled during the scanning exposure to adjust the illumination intensity or energy in a predetermined way. The resulting selective change in exposure dose corrects local area of line width variance. Various errors in pattern reproduction using a photolithographic system are relatively easily corrected. This is particularly advantageous in a scanning lithography system used in the manufacture of semiconductors.
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Callan David
Galburt Daniel N.
Govil Pradeep K.
McCullough Andrew W.
Fattibene Arthur T.
Fattibene Paul A.
Metjahic Safet
Nguyen Hung Henry
SVG Lithography Systems, Inc.
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