Data processing: measuring – calibrating – or testing – Testing system – Of circuit
Reexamination Certificate
2006-11-21
2006-11-21
Nghiem, Michael (Department: 2863)
Data processing: measuring, calibrating, or testing
Testing system
Of circuit
C702S118000
Reexamination Certificate
active
07139672
ABSTRACT:
An apparatus, method, system, and signal-bearing medium may provide multiple maps, which may include multiple probing sequences to be called upon at run-time based on statistical thresholds or other selected criteria. Each map may include a series of locations on a wafer, the tests to perform at each location, and the measured results of each test. A parametric test system may perform the test at the associated location on the wafer. If the statistical threshold is exceeded or the selected criteria is met, the current map may be abandoned in favor of a different map.
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Blunn Robert G.
Dorough Michael J.
Velichko Sergey A.
Micro)n Technology, Inc.
Nghiem Michael
Schwegman Lundberg Woessner & Kluth P.A.
Washburn Douglas N.
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