Dynamic random access memory device having a plurality of one tr

Details Dynamic random access memory device having a plurality of one tr Dynamic random access memory device having a plurality of one tr

1988-04-13

1990-04-17

Hille, Rolf

Fishing, trapping, and vermin destroying

357 54, 357 55, 357 45, 437 52, H01L 2978, H01L 2934, H01L 2702, H01L 2710

Patent

active

049185039

ABSTRACT:
A dynamic random access memory device having one transistor type memory cells is disclosed. The memory cell includes a trench type storage capacitor and a transfer gate transistor. The dielectric film of the capacitor is formed in the trench such that the upper part of the film above the upper wall of the trench adjacent to the major surface of the substrate is thicker than the other parts of the film in the trench.

REFERENCES:
patent: 4801989 (1989-01-01), Taguchi

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