Dynamic quantity sensor and method for producing the same, disto

Details Dynamic quantity sensor and method for producing the same, disto Dynamic quantity sensor and method for producing the same, disto

1995-10-03

1997-10-21

Noland, Thomas P.

Measuring and testing

Surface and cutting edge testing

Roughness

250306, G01D 506, G01B 734

Patent

active

056798881

ABSTRACT:
The dynamic quantity sensor includes an electrically insulating substance layer and at least one pair of electrodes contacting the electrically insulating substance layer, wherein a plurality of conductive particles are dispersed in the electrically insulating substance layer so that a tunnel current flows when a voltage is applied between the at least one pair of electrodes, and a dynamic quantity relating to a distance between the conductive particles is detected based on the tunnel current.

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Tanahashi et al, J. Mater. Res., vol. 10, No. 2, pp. 362-365, Feb. 1995, "Effects of Heat Treatment on Ag Particle Growth and Optical . . . ".

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