Dynamic pressure sensing structure

Electrical audio signal processing systems and devices – Electro-acoustic audio transducer – Microphone capsule only

Reexamination Certificate

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C381S175000, C381S191000

Reexamination Certificate

active

11033503

ABSTRACT:
A dynamic pressure sensing structure used in a condenser microphone includes an upper electrode plate, a lower electrode plate, a spacer and a substrate, wherein the upper and lower electrode plates are separated by the spacer and form a resonance cavity with the substrate. The upper electrode plate comprises a flat vibration area and a surrounding flexible area connected thereto. The lower electrode plate comprises a sensible electrode and an actuation electrode surrounding the sensible electrode. The plate is in connection with the flexible area so that a capacitor is formed between the sense area and the flat vibration area. The actuation electrode provides a polarization voltage to generate an electrostatic force, thereby attract the flexible vibration area to curve downwards so that the flat vibration area moves in a flat state and a distance between the flat vibration area and the sensible electrode is varied correspondingly.

REFERENCES:
patent: 5208789 (1993-05-01), Ling
patent: 5452268 (1995-09-01), Bernstein
patent: 5740261 (1998-04-01), Loeppert et al.
patent: 5870482 (1999-02-01), Loeppert et al.
patent: 6088463 (2000-07-01), Rombach et al.
patent: 7146016 (2006-12-01), Pedersen

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