Dynamic overdrive compensation test system and method

Details Dynamic overdrive compensation test system and method Dynamic overdrive compensation test system and method

2006-10-31

2006-10-31

Hollington, Jermele (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

Reexamination Certificate

active

07129733

ABSTRACT:
The invention(s) relates to a wafer test system including a circuit to communicate an overdrive to a chuck, the chuck moving a wafer towards a probe head responsive to the overdrive, a circuit to measure a contact resistance of at least one channel in each of a plurality of dies associated with the wafer using the probe head, a circuit to compute a per channel standard deviation responsive to measuring the contact resistance, a circuit to compare the standard deviation on the at least one channel to a threshold, and a circuit to increase the overdrive responsive to the comparison.

REFERENCES:
patent: 6107109 (2000-08-01), Akram et al.
patent: 6127831 (2000-10-01), Khoury et al.
patent: 6218848 (2001-04-01), Hembree et al.
patent: 6314641 (2001-11-01), Akram
patent: 6833613 (2004-12-01), Akram et al.
patent: 6891385 (2005-05-01), Miller
patent: 58021838 (1983-02-01), None

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