Dynamic-mode atomic-force-microscope probe (Tip) vibration...

Data processing: measuring – calibrating – or testing – Calibration or correction system – Position measurement

Reexamination Certificate

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C073S105000

Reexamination Certificate

active

07853422

ABSTRACT:
The vibration characteristic of a dynamic AFM probe is simulated. For a given operation parameter (for example, the displacement u0of the probe, the spring constant k of the cantilever, or the radius of curvature of the probe R1), the plate-spring cantilever to which the probe is attached is vertically moved while being mechanically resonated, and the vibration characteristic of the probe of the dynamic mode atomic force microscope (AFM) for observing the structure of the sample surface is simulated. The vibration information on the probe in the steady state at each initial position u0(displacement u−time τ) (S103, S104) is recorded, and the movement of the probe is visualized by GUI on the basis of the recorded vibration information. An essential spectroscopy obtained by the AFM, for example the ampliture a−probe initial position u0relation or the interaction force F−probe initial position u0relation is determined and shown on a graph according to the approach/separation of the probe (cantilever) to/from the surface.

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International Search Report.

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