Optics: measuring and testing – By particle light scattering – With photocell detection
Patent
1986-12-12
1987-12-08
Willis, Davis L.
Optics: measuring and testing
By particle light scattering
With photocell detection
318640, 356349, 356351, G01J 345
Patent
active
047115734
ABSTRACT:
An improved mirror alignment control for dynamically aligning the reflecting mirrors bounding the optical path in an interferometer comprises a closed loop servo control which utilizes a two frequency laser beam to provide phase comparison between beams traversing differing portions of the optical paths in the interferometer to determine alignment of the mirrors, said phase comparison providing a correction signal to direct multi-axial alignment of at least one of the mirrors.
REFERENCES:
patent: 4053231 (1977-10-01), Fletcher et al.
patent: 4444501 (1984-04-01), Schwiesow
Hercher Michael
Wijntjes Geert
Beckman Instruments Inc.
Harder P. R.
Koren Matthew W.
Markl Steven R.
May William H.
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