Dynamic mask projection stereo micro lithography

Details Dynamic mask projection stereo micro lithography Dynamic mask projection stereo micro lithography

2006-08-08

2006-08-08

Fuller, Rodney (Department: 2851)

Photocopying

Projection printing and copying cameras

Methods

C355S032000, C264S401000, C427S512000

Reexamination Certificate

active

07088432

ABSTRACT:
Three-dimensional structures are fabricated by a process in which a 3D solid model is designed by software at a PC and sliced into a series of 2D layers. Each 2D layer is displayed at a dynamic mask via micro-mirror deflections projected onto a photoresist to form a layer, which is lowered and the process is repeated to build the object layer by layer.

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patent: WO98/06560 (1998-02-01), None
patent: WO 99/63385 (1999-12-01), None

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