Dynamic maintenance of manufacturing system components

Details Dynamic maintenance of manufacturing system components Dynamic maintenance of manufacturing system components

2005-05-10

2005-05-10

Smith, Matthew (Department: 2825)

Semiconductor device manufacturing: process

With measuring or testing

C438S005000, C438S018000, C438S004000, C438S017000, C257S048000, C257SE21520, C702S097000, C702S085000, C702S108000, C702S118000, C700S100000

Reexamination Certificate

active

06890773

ABSTRACT:
A method and an apparatus for sorting between actual and perceived errors related to processing of semiconductor wafers. A plurality of semiconductor wafers are processed. Fault data relating to the processed semiconductor wafers is acquired. A trend associated with the fault data is determined. A determination is made whether the fault data relates to an actual fault associated with the semiconductor wafers or to a calibration error, based upon the trend. A component is notified of the calibration error in response to the determination that the fault data relates to the calibration error.

REFERENCES:
patent: 5410495 (1995-04-01), Ramamurthi
patent: 6161054 (2000-12-01), Rosenthal et al.
patent: 6248602 (2001-06-01), Bode et al.
patent: 6532428 (2003-03-01), Toprac

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