Dynamic interferometer controlling direction of input beam

Details Dynamic interferometer controlling direction of input beam Dynamic interferometer controlling direction of input beam

2006-01-17

2006-01-17

Turner, Samuel A. (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S510000

Reexamination Certificate

active

06987569

ABSTRACT:
Interferometers can be configured to maintain a measurement beam substantially orthogonal to a plane measurement mirror and to minimize the lateral beam shear between the measurement and reference beam components of the output beam to a detector. These interferometers use a dynamic beam steering element to redirect the input beam in response to changes in the orientation of the measurement plane mirror. These interferometers may be further configured to measure displacement and change in orientation of the plane mirror or configured in a combination of single pass interferometers fed by the input beam for measuring displacement and change in orientation of the plane mirror.

REFERENCES:
patent: 4413908 (1983-11-01), Abrams et al.
patent: 4606638 (1986-08-01), Sommargren
patent: 4662750 (1987-05-01), Barger
patent: 4711573 (1987-12-01), Wijntjes et al.
patent: 4714339 (1987-12-01), Lau et al.
patent: 4790651 (1988-12-01), Brown et al.
patent: 4802765 (1989-02-01), Young et al.
patent: 4859066 (1989-08-01), Sommargren
patent: 4881816 (1989-11-01), Zanomi
patent: 4948254 (1990-08-01), Ishida
patent: 5064289 (1991-11-01), Bockman
patent: 5114234 (1992-05-01), Otsuka et al.
patent: 5151749 (1992-09-01), Tanimoto et al.
patent: 5187543 (1993-02-01), Ebert
patent: 5249016 (1993-09-01), Tanaka
patent: 5331400 (1994-07-01), Wilkening et al.
patent: 5404222 (1995-04-01), Lis
patent: 5408318 (1995-04-01), Slater
patent: 5432603 (1995-07-01), Sentoku et al.
patent: 5483343 (1996-01-01), Iwamoto et al.
patent: 5491550 (1996-02-01), Dabbs
patent: 5663793 (1997-09-01), de Groot
patent: 5724136 (1998-03-01), Zanoni
patent: 5757160 (1998-05-01), Kreuzer
patent: 5764361 (1998-06-01), Kato et al.
patent: 5781277 (1998-07-01), Iwamoto
patent: 5781297 (1998-07-01), Castore
patent: 5790253 (1998-08-01), Kamiya
patent: 5801832 (1998-09-01), Van Den Brink
patent: 5841125 (1998-11-01), Livingston
patent: 5850291 (1998-12-01), Tsutsui
patent: 5940180 (1999-08-01), Ostby
patent: 5969800 (1999-10-01), Makinouchi
patent: 6008902 (1999-12-01), Rinn
patent: 6020964 (2000-02-01), Loopstra et al.
patent: 6040096 (2000-03-01), Kakizaki et al.
patent: 6046792 (2000-04-01), Van Der Werf et al.
patent: 6134007 (2000-10-01), Naraki et al.
patent: 6137574 (2000-10-01), Hill
patent: 6147748 (2000-11-01), Hughes
patent: 6160619 (2000-12-01), Magome
patent: 6181420 (2001-01-01), Badami et al.
patent: 6201609 (2001-03-01), Hill et al.
patent: 6208424 (2001-03-01), de Groot
patent: 6236507 (2001-05-01), Hill et al.
patent: 6252667 (2001-06-01), Hill et al.
patent: 6252668 (2001-06-01), Hill
patent: 6271923 (2001-08-01), Hill
patent: 6304318 (2001-10-01), Matsumoto
patent: 6313918 (2001-11-01), Hill et al.
patent: 6330065 (2001-12-01), Hill
patent: 6330105 (2001-12-01), Rozelle et al.
patent: 6541759 (2003-04-01), Hill
patent: 6552804 (2003-04-01), Hill
patent: 6563593 (2003-05-01), Hill
patent: 6687013 (2004-02-01), Isshiki et al.
patent: 6747744 (2004-06-01), Hill
patent: 6806961 (2004-10-01), Hill
patent: 2001/0035959 (2001-11-01), Hill
patent: 2002/0048026 (2002-04-01), Isshiki et al.
patent: 2002/0089671 (2002-07-01), Hill
patent: 2003/0053074 (2003-03-01), Hill
patent: 2003/0090675 (2003-05-01), Fujiwara
patent: 2003/0117631 (2003-06-01), Hill et al.
patent: 40 31 291 (1992-06-01), None
patent: 0 514 579 (1992-11-01), None
patent: 0 689 030 (1995-12-01), None
patent: 7-351078 (1995-12-01), None
patent: 8-117083 (1996-04-01), None
patent: 10 260009 (1998-09-01), None
patent: WO 00/17605 (2000-03-01), None
patent: WO 00/66969 (2000-11-01), None
Badami, V.G. et al. “Investigation of Nonlinearity in High Accuracy Heterodyne Laser Interferometry.”American Society for Precision Engineering 1997 Proceedings, 16:pp. 153-156, 1997.
Bennett, S.J. “A Double-Passed Michelson Interferometer.”Optics Communications, 4:6, pp. 428-430, 1972.
Bobroff, Norman. “Recent advances in displacement measuring interferometry.”Meas. Sci. Technol, 4: pp. 907-926, 1993.
Hines, Brad et al. “Sub-Nanometer Laser Metrology-Some Techniques and Models.”European Southern Observatory, ESO Conference, pp. 1195-1204, 1991.
Oka, K. et al., “Polarization heterodyne interferometry using another local oscillator beam.”Optics Communications, 92:pp 1-5, 1992.
Wu, Chien-Ming. Analytical modeling of the periodic nonlinearity in heterodyne interferometry.Applied Optics, 37:28 pp. 6696-6700, 1998.
Bennett, S.J. . “A Double-Passed Michelson Interferometer.” Optics Communications, 4:6, pp. 428-430, 1972.
Wu et al. “Analytical modeling of the periodic nonlinearity in heterodyne interferometry.” Applied Optics, 37:28, pp. 6696-6700, 1998.
Hines et al. Sub-Nonometer Laser Metrology—Some Techniques and Models. ESO Conference on High-Resolution Imaging by Interferometry II, pp. 1195-1204, 1991.
Bobroff, Norman. “Recent advances in displacement measuring interferometry.” Meas. Sci. Technol. 4, pp. 907-926, 1993.
Oka et al. “Polarization heterodyne interferometry using another local oscillator beam.” Optics Communications, 92, pp. 1-5, 1992.
Mauer, Paul. “Phase Compensation of Total Interanal Reflection.” J. Opt. Soc. Am., 56:9, pp. 1219-1221, 1966/.
Player, M.A. “Polarization properties of a cube-corner reflector.” J. Mod. Opt., 35:11, pp. 1813-1820, 1988.
Badami et al. “Investigation of NonLinearity in High Accuracy Heterodyne Laser Interferometry.” American Society for Precision Engineering, 1997, Proceedings, 16, pp. 153-156, 1997.
Bobroff, Norman. “Residual errors in laser interferometry from air turbulence and nonlinearity.” Applied Optics, 26:13, pp. 2676-2686, 1987.
Mitsuru Tanaka, et al., “Linear Interpolation of Periodic Error in a Heterodyne Laser Interferometer at Subnanometer Levels”, IEEE Transactions on Instrumentation and Measurement, 38:2, pp. 553-554, Apr. 1989.
Wu et al., “Nonlinearity in measurements of length by optical interferometry”, Measurement Science and Technology, 7:1, pp. 62-68, Jan. 1996.

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