Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2011-07-05
2011-07-05
Pham, Hoa Q (Department: 2886)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
C356S237500
Reexamination Certificate
active
07973921
ABSTRACT:
An optical inspection system or tool can be configured to inspect objects using dynamic illumination where one or more characteristics of the illumination is/are adjusted to meet the inspection needs of different areas. For example, the illumination intensity may be increased or decreased as the tool inspects areas of memory and periphery features in a wafer die. In some embodiments, the adjustment can be based on data obtained during a pre-inspection setup sequence in which images taken based on illumination with varying characteristics are evaluated for suitability in the remainder of the inspection process.
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Avni Tsafrir
Silberstein Shai
Applied Materials South East Asia Pte Ltd.
Pham Hoa Q
SNR Denton US LLP
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