Dynamic compensation of non-linear electron beam landing angle i

Details Dynamic compensation of non-linear electron beam landing angle i Dynamic compensation of non-linear electron beam landing angle i

1992-06-03

1994-02-08

Anderson, Bruce C.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

250396ML, H01J 37147

Patent

active

052850749

ABSTRACT:
A dynamic correction arrangement for an electron beam projection/deflection system provides high order correction values for deflection in accordance with a correction equation. Particularly as applied to high accuracy telecentric deflection, the coefficients of terms of the correction equation may be determined by calibration for a small number of test points. Correction values may be stored in a look-up table or computed in real time by using a math co-processor in a processing pipeline. The correction provided corrects landing angle errors through the third order in telecentric projection/deflection systems such as systems utilizing variable axis immersion lenses.

REFERENCES:
patent: 4362942 (1982-12-01), Yasuda
patent: 4544846 (1985-10-01), Langner et al.
patent: 4728797 (1988-03-01), Gotou et al.
patent: 4789945 (1988-12-01), Niijima
patent: 4859856 (1989-08-01), Groves et al.
patent: 5047647 (1991-09-01), Itoh et al.
patent: 5148033 (1992-09-01), Yamada et al.

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