Dynamic accuracy X-Y positioning table for use in a high precisi

Details Dynamic accuracy X-Y positioning table for use in a high precisi Dynamic accuracy X-Y positioning table for use in a high precisi

1982-10-14

1984-08-07

Wintercorn, Richard A.

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Record receiver deforming

346 76L, 346108, 355 53, G03B 4100

Patent

active

044640307

ABSTRACT:
A commercial X-Y positioning table is modified, to limit its dynamic X-positioning error to less than .+-.0.05 micrometer at rates of speed in the Y direction of up to 20 millimeters per second, by mounting an X direction translation stage having fast inertial response characteristics on the Y direction stage of the positioning table and employing an interferometer controlled X position feedback circuit to provide X error compensating movement of the translation stage with respect to dynamic X position errors of the Y direction stage. This permits the generation of sub-micrometer geometry exposure patterns in photoresist for the fabrication of fine relief structures.

REFERENCES:
patent: 3563648 (1971-02-01), Baggaley et al.
patent: 3632205 (1972-01-01), Marcy
patent: 3985439 (1976-10-01), Kiemle
patent: 4404569 (1983-09-01), Neumann et al.
patent: 4419675 (1983-12-01), Neumann et al.
patent: 4422083 (1983-12-01), Neumann et al.
IBM Technical Disclosure Bulletin, "Master Artwork Generator System", Bloem et al., vol. 21, No. 9, Feb. 1979, pp. 3599-3600.

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