Dusttight storage cabinet apparatus for use in clean rooms

Details Dusttight storage cabinet apparatus for use in clean rooms Dusttight storage cabinet apparatus for use in clean rooms

1987-11-20

1989-09-19

Bucci, David A.

Material or article handling

Movable rack having superposed, charge-supporting elements,...

Rack moved vertically by elevating means

981153, 211 41, 211163, 414217, B65G 1133

Patent

active

048676292

ABSTRACT:
There is disclosed a dusttight storage cabinet apparatus used for storing works such as wafer cassettes for containing semiconductor wafers. The storage cabinet apparatus includes: a housing having an entrance, formed in its front wall, for allowing works to come in and go out of the housing therethrough; an air supply duct for supplying the inside of the housing with clean air; a vertical rotation shaft rotatably disposed in the housing for turning about its longitudinal axis; a drive motor for turning the rotation shaft; and a rack assembly of a substantially cylindrical structure. The rack assembly is coaxially secured to the rotation shaft and has a plurality of compartments for storing the works therewithin. The compartments open radially outward and are partitioned off from one another so as to prevent cross contamination by dust among the compartments.

REFERENCES:
patent: 3902773 (1975-09-01), Gondek
patent: 4269124 (1981-05-01), Rosenthal et al.
patent: 4293249 (1981-10-01), Whelan
patent: 4659281 (1987-04-01), Aupperle
patent: 4676144 (1987-06-01), Smith, III
patent: 4699554 (1987-10-01), Kawashima et al.
patent: 4701096 (1987-10-01), Fisher, Jr.
patent: 4723480 (1988-02-01), Yagi et al.

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