Dust resistant load port apparatus and mini-environment system

Details Dust resistant load port apparatus and mini-environment system Dust resistant load port apparatus and mini-environment system

2010-06-15

2011-10-04

Keenan, James (Department: 3652)

Material or article handling

Device for emptying portable receptacle

With container opening means

C414S217100, C414S939000

Reexamination Certificate

active

08029227

ABSTRACT:
In a load port apparatus, a clearance is formed between an inner circumferential surface of an opening of the chamber and an outer circumferential surface of a door. The area of the clearance between the plate and the opening portion on a plane flush with an interior side of the chamber is larger than the area of the clearance between the plate and the opening portion on a plane flush with the exterior of the chamber. A fan located at an upper side of the chamber generates a first flow of air in the downward direction. The clearance generates a second flow of air from the interior of the chamber to the exterior of the chamber. The second flow of air is generated by the difference in the area of the interior cross section of the clearance and area of the exterior cross section of the clearance.

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