Dust-proof film

Details Dust-proof film Dust-proof film

1988-08-05

1992-02-04

Epstein, Henry F.

Stock material or miscellaneous articles

Display in frame or transparent casing; or diorama including...

Peripheral enclosure or frame

156 60, 355122, 428 45, A47G 112

Patent

active

050858998

ABSTRACT:
A dust-proof film comprising a pellicle frame and a pellicle film spread on one side face of the frame, which is attached to a photomask, a reticle or the like to prevent a foreign substance from adhering to a pattern, wherein a paint is coated on the inner side face of the pellicle frame to form a coating layer, whereby a generation of dust from a surface of the pellicle frame is prevented.

REFERENCES:
patent: 2165539 (1939-07-01), Dahlgren
patent: 2888368 (1959-05-01), Grantham
patent: 3082453 (1963-03-01), Mutchler et al.
patent: 4470508 (1984-09-01), Yen
patent: 4476172 (1984-10-01), Ward
patent: 4482591 (1984-11-01), Ward
patent: 4537813 (1985-08-01), Kuyel
patent: 4737387 (1988-04-01), Yen
patent: 4759990 (1988-07-01), Yen
patent: 4764421 (1988-08-01), Horiki et al.
Patent Abstracts of Japan, vol. 11, No. 91 (P-558) [2538], Mar. 23, 1987 (Abstract of Japan Pub. Pat. Appln. 61-241756).
Patent Abstracts of Japan, vol. 9, No. 190 (P-378) [1913], Aug. 7, 1985 (Abstract of Japan Pub. Pat. Appln. 60-57841).
Patent Abstracts of Japan, vol. 9, No. 214 (P-384) [1937], Aug. 31, 1985 (Abstract of Japan Pub. Pat. Appln. 60-75835).

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