Special receptacle or package – For a building component – Shingle
Patent
1988-02-10
1989-06-27
Gehman, Bryon P.
Special receptacle or package
For a building component
Shingle
16 485, 206334, 206449, 220260, 220339, B65D 7302
Patent
active
048421367
ABSTRACT:
A dust-proof container for keeping therein a mask or reticle usable to transfer a pattern onto a semiconductor wafer for the manufacture of integrated circuits, is disclosed. The container includes a casing within which supporting pins for supporting the mask or reticle are formed. Also, in the casing, there are provided leaf springs for pressing the mask or reticle toward the supporting pins, and a releasing mechanism for releasing the reticle pressing force of the leaf springs. The releasing mechanism is responsive to a non-mechanical signal such as an electric signal to release the reticle pressing force. A shape memory alloy may be usable in the releasing mechanism. An opening/closing mechanism is provided to open/close a door which is operable to cover an opening formed in the casing for the insertion and extraction of the mask or reticle. A shape memory alloy may be used in the opening/closing mechanism. With the dust-proof container of the present invention, the necessity of use of a mechanical-signal transmitting system such as a linkage or otherwise in the casing is avoided. This effectively prevents creation of dust or foreign particles within the casing due to mechanical friction contact. Also, the possiblity of adhesion of dust or foreign particles to the mask or reticle contained in the container can be minimized.
REFERENCES:
patent: 3615006 (1971-10-01), Freed
patent: 4313538 (1987-02-01), Bover et al.
patent: 4422547 (1983-12-01), Abe et al.
patent: 4432609 (1984-02-01), Dueker et al.
patent: 4533043 (1985-08-01), Swain
patent: 4535887 (1985-08-01), Egawa
patent: 4564880 (1986-01-01), Christ et al.
patent: 4681221 (1987-07-01), Chickanosky et al.
patent: 4706330 (1987-11-01), Sampson
patent: 4776462 (1988-10-01), Kosugi et al.
Iijima Mamoru
Nakazato Hiroshi
Canon Kabushiki Kaisha
Gehman Bryon P.
LandOfFree
Dust-proof container having improved construction for holding a does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Dust-proof container having improved construction for holding a , we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Dust-proof container having improved construction for holding a will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-806495