Dust precipitation in a gas laser

Details Dust precipitation in a gas laser Dust precipitation in a gas laser

1992-12-18

1994-06-07

Bovernick, Rodney B.

Coherent light generators

Particular active media

Gas

372 55, 372 57, 372 58, H01S 322

Patent

active

053196635

ABSTRACT:
Dust in a gas laser, particularly an excimer laser, is removed from the gas charge by one or more electrostatic precipitators that are located inside the laser vessel in the path of gas circulation that is produced by a fan and passes through the discharge area defined by the main discharge electrodes. The gas is caused to travel rapidly past the precipitator so that only a minor proportion of the dust is removed at each pass, but a low background level of dust in the gas is soon achieved and maintained by repeated such passes. This technique of employing multiple passes, each removing only a small percentage of the dust in the gas at any given time, can also be applied to a system in which the precipitator is located outside the vessel and is connected thereto by conduits.

REFERENCES:
patent: 3633337 (1972-01-01), Walker
patent: 4031484 (1977-06-01), Frieberg et al.
patent: 4316157 (1982-02-01), Dosi et al.
patent: 4534034 (1985-08-01), Hohla et al.
patent: 4550408 (1985-10-01), Karning et al.
patent: 4611327 (1986-09-01), Clark et al.
patent: 4695358 (1987-09-01), Mizuno et al.
patent: 4718072 (1988-01-01), Marchetti et al.
patent: 5048041 (1991-09-01), Akins et al.
patent: 5200970 (1993-04-01), Klopotek
Harry White, "Industrial Electrostatic Precipitation", Addison Welsey, pp. 159-165 (1963).

Affiliated with

Also associated with

Rating

Dust precipitation in a gas laser does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Dust precipitation in a gas laser, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Dust precipitation in a gas laser will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-799488