Brushing – scrubbing – and general cleaning – Machines – With air blast or suction
Reexamination Certificate
1999-02-16
2001-08-14
Moore, Chris K. (Department: 1744)
Brushing, scrubbing, and general cleaning
Machines
With air blast or suction
C096S350000, C261S119100
Reexamination Certificate
active
06272719
ABSTRACT:
CROSS-REFERENCE TO RELATED APPLICATION
This application claims the priority benefit of Taiwan application Ser. No. 87120061, filed Dec. 3, 1998, the full disclosure of which is incorporated herein by reference.
BACKGROUND OF THE INVENTION
1. Field of the Invention
The invention relates to a dust-collecting device, and in particular to a dust-collecting barrow, which uses a suction force to collect various chemical materials or particles.
2. Description of the Related Art
In IC manufacturing, an extremely high cleanliness class is required to manufacture ICs with expected functions. Also, IC integrity is further increased in current semiconductor technology development. Therefore, it is important to clean semiconductor-manufacturing equipment with chemical materials and dust particles remaining thereon, including dust-free chambers for manufacturing high-performance semiconductor devices.
In the processes of prior art, a dust-free wiper is mainly used to clean contaminated parts of semiconductor equipment including dust-free chambers. During cleaning with the dust-free wiper, chemical materials and/or dust particles can adhere to the wiper. If the used wiper is not carefully and well disposed of, the chemical materials and/or dust particles, such as polymers and/or metal particles stuck on the wiper can react with each other, resulting in the generation of toxic products and/or even an accident caused by drastic explosions. This seriously affects the environmental safety, especially with regard to the dust-free chambers.
Furthermore, low vacuum devices in dust-free chambers are only used to clean chemical products, such as polymers, produced therein, and have no additional functions.
SUMMARY OF THE INVENTION
In view of the above, a first object of the invention is to provide a dust-collecting barrow in which a silicon oil that has a chemical stability and is unable to react with other materials is used to absorb various chemical polymers or particles.
A second object of the invention is to provide a dust-collecting barrow in which a great number of opening spacers are formed, into which various chemical polymers or particles are collected by the generation of a low vacuum, wherein the various collected chemical polymers or particles are deposited in different spaces according to weights and sizes thereof, so that the various chemical polymers or particles can be prevented from reacting with each other.
A third object of the invention is to provide a dust-collecting barrow which has a better mobility, is easily cleaned, and can be repeatedly used.
To achieve the above-stated objects, the dust-collecting barrow, suitable for use in a dust-free chamber in a semiconductor factory, includes a barrow body, a barrow base, a suction hose and a low vacuum hose. In the barrow body, a plurality of dividers are alternately arranged to form a plurality of open spaces and a passage. Furthermore, the barrow body has a first hole and a second hole, which are connected to the suction hose and the low vacuum hose, respectively. The barrow base is located on the bottom of the barrow body and has a layer of oil located thereon, which oil is used to absorb various chemical polymers, metal particles or dust particles. The chemical polymers, metal particles or dust particles are collected into the dust-free barrow by a low vacuum suction force through the suction hose. Once inside the dust-barrow, the collected chemical polymers, metal particles or dust particles are deposited in different open spaces along the passage according to the weights and sizes thereof. The heaviest or largest chemical polymers, metal particles or dust particles in weight and size are first deposited in a first space, next heaviest or largest chemical polymers, metal particles or dust particles are deposited in a second space, and so on. The number of the spaces depends on practical requirements. Moreover, the barrow base has a set of wheels while the barrow body has a handle for easy pushing. The barrow base has oil-draining holes formed therein.
In the dust-collecting barrow of the invention, since the layer of oil is chemically stable and does not react with other chemical materials, the oil can be used to absorb chemical materials. Furthermore, the absorbed chemical materials are deposited in different spaces according to the different weights thereof. It is obvious that the absorbed chemical materials which are deposited in the different spaces filled with the oil cannot react with each other. Therefore, the dust-collecting barrow according to the invention can categorically collect chemical polymers. metal particles and dust particles.
For convenient operation, the dust-collecting barrow has a set of wheels and a handle. Therefore, the dust-collecting barrow has advantages of being able to speedily maintain and clean equipment including a dust-free chamber.
REFERENCES:
patent: 923547 (1909-06-01), Mayo et al.
patent: 1014027 (1912-01-01), Walter
patent: 1788410 (1931-01-01), Runyon
patent: 1832245 (1931-11-01), Runyon
patent: 4172865 (1979-10-01), Steier
patent: 4358300 (1982-11-01), Schlapman et al.
patent: 5210902 (1993-05-01), Lee et al.
Huang Jiawei
J.C. Patents
Moore Chris K.
Winbond Electronics Corp.
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