Durable platinum/polyimide sensing structures

Stock material or miscellaneous articles – All metal or with adjacent metals – Composite; i.e. – plural – adjacent – spatially distinct metal...

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428662, 428670, 428606, 428926, 257769, 205170, 205183, 205212, 205917, B32B 1500, B32B 1501, B32B 300, B21C 3700

Patent

active

057801738

ABSTRACT:
The durability and reliability of a polymer layer/metal layer sensor structure is improved by the incorporation of a metal oxide, e.g., tantalum oxide (Ta.sub.2 O.sub.5), layer between the polymer, e.g., polyimide, and the metal, e.g., platinum. sensor element.

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patent: 5086650 (1992-02-01), Harrington et al.
patent: 5243858 (1993-09-01), Erskine et al.
patent: 5263380 (1993-11-01), Sultan et al.

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