Durable insulating protective layer for hybrid CCD/mosaic IR det

Details Durable insulating protective layer for hybrid CCD/mosaic IR det Durable insulating protective layer for hybrid CCD/mosaic IR det

1977-09-01

1980-04-08

Tupman, W.

Metal working

Method of mechanical manufacture

Assembling or joining

29589, B01J 1700

Patent

active

041965086

ABSTRACT:
A hybrid mosaic IR/CCD focal plane structure is fabricated on a silicon substrate which contains integrated circuit CCD signal processing circuitry. Contact pads are formed which are connected to the signal processing circuitry and which extend above the surface of the silicon substrate. An insulator layer is formed which covers the substrate and the contact pads. The insulator layer is then lapped to form an essentially planar surface with the contact pads exposed. A mosaic detector array is fabricated on the insulator layer, and thin film electrical interconnects are formed from the detectors to the exposed contact pads to couple the photosignals from the detector array to the CCD circuitry.

REFERENCES:
patent: 3152939 (1964-10-01), Borneman
patent: 3332137 (1967-07-01), Kenney
patent: 3726002 (1973-04-01), Greenstein
patent: 3805375 (1974-04-01), La Combe

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