Durable graphite connector and method for manufacturing thereof

Details Durable graphite connector and method for manufacturing thereof Durable graphite connector and method for manufacturing thereof

2006-10-12

2008-09-02

Fuqua, Shawntina (Department: 3742)

Electric heating

Heating devices

With heating unit structure

C219S544000, C219S444100, C219S443100, C219S540000, C219S546000, C219S548000, C219S553000, C392S407000, C392S432000, C118S725000, C118S728000, C338S248000, C338S249000

Reexamination Certificate

active

07420143

ABSTRACT:
An article comprising a graphite part coated with a pyrolytic graphite (pG) for increased mechanical strength of at least 25% over an uncoated graphite part. In connector applications for use in a semiconductor processing assembly such as a heater, the pG coated component is overcoated with at least a protective layer of an electrically insulating material, and wherein part of the pG coated graphite part is exposed (uncoated with the protective layer) for providing electrical connections to the assembly.

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