Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified configuration
Reexamination Certificate
2005-03-24
2009-06-09
Coleman, W. David (Department: 2823)
Active solid-state devices (e.g., transistors, solid-state diode
Combined with electrical contact or lead
Of specified configuration
C257S621000, C257SE21597, C257SE21577, C257SE21578, C438S629000, C438S668000, C438S672000
Reexamination Certificate
active
07545045
ABSTRACT:
A dummy via design for a dual damascene structure has a dielectric layer on a substrate, a dual damascene structure filled with a conductive material and inlaid in the dielectric layer, and a dummy via structure filled with a non-conductive material and inlaid in the dielectric layer. The dummy via structure has at least two dummy vias filled with the non-conductive material and located adjacent to two sides of the dual damascene structure respectively.
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General definition of “Low K dielectric” www.wikipedia.org, Search word low K.
Definition of low-k dielectric by http://semiconductorglossary.com: search work: low-k.
Chinese Office Action for 2006100023526.
Chen Tsong-Yuan
Huang Kun-Cheng
Huang Ssu-Chia
Liu Kuan-Miao
Tsai Tin-Lin
Birch & Stewart Kolasch & Birch, LLP
Coleman W. David
Kim Su C
Taiwan Semiconductor Manufacturing Co. Ltd.
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