Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent
1989-12-18
1991-01-01
Werner, Frank E.
Material or article handling
Apparatus for moving material between zones having different...
For carrying standarized mechanical interface type
118719, 414222, B65G 106
Patent
active
049814087
ABSTRACT:
A dual track substrate handling and processing system includes an entrance load lock station, an exit load lock station and a plurality of substrate processing stations, all positioned above a transfer vacuum chamber. The load lock station and each processing station are configured to hold two vertically oriented workpieces. A transport system conveys workpieces two at a time from parallel input cassettes to the entrance load lock station. The transport system includes a transport assembly that simultaneously advances two workpieces from each station to the next station; thus workpieces are processed two at a time in the same environment in each processing station and system throughput is correspondingly increased.
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Hughes John L.
Rodriguez Carlos E.
Shula Thomas E.
Cole Stanley Z.
Fisher Gerald M.
Katz Robert S.
Sgarbossa Peter J.
Varian Associates Inc.
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