Dual surface interferometer

Details Dual surface interferometer Dual surface interferometer

1980-09-12

1982-06-15

Corbin, John K.

Optics: measuring and testing

By particle light scattering

With photocell detection

356351, 356358, G01B 902

Patent

active

043347789

ABSTRACT:
A double-pass interferometer is provided which allows direct measurement of relative displacement between opposed surfaces. A conventional plane mirror interferometer may be modified by replacing the beam-measuring path cube-corner reflector with an additional quarter-wave plate. The beam path is altered to extend to an opposed plane mirrored surface and the reflected beam is placed in interference with a retained reference beam split from dual-beam source and retroreflected by a reference cube-corner reflector mounted stationary with the interferometer housing. This permits direct measurement of opposed mirror surfaces by laser interferometry while doubling the resolution as with a conventional double-pass plane mirror laser interferometer system.

REFERENCES:
patent: 3788746 (1974-01-01), Baldwin et al.
patent: 3976379 (1976-08-01), Morokawa
Bennett, "A Double-Passed Michelson Interferometer", Optics Communications vol. 4, No. 6, pp. 428-430, Mar. 1972.

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