Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2006-05-16
2006-05-16
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
C356S237400, C356S237500, C356S394000, C382S145000
Reexamination Certificate
active
07046355
ABSTRACT:
A method and apparatus for inspecting patterned substrates, such as photomasks, for unwanted particles and features occurring on the transmissive as well as pattern defects. A transmissive substrate is illuminated by a laser through an optical system comprised of a laser scanning system, individual transmitted and reflected light collection optics and detectors collect and generate signals representative of the light transmitted and reflected by the substrate. The defect identification of the substrate is performed using transmitted and reflected light signals from a baseline comparison between two specimens, or one specimen and a database representation, to form a calibration pixelated training set including a non-defective region. This calibration pixilated training set is compared to a transmitted-reflected plot map of the subject specimen to assess surface quality.
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KLA-Tencor Technologies Corporation
Nguyen Sang H.
Smyrski Law Group, A P.C.
Toatley , Jr. Gregory J.
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