Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1985-07-03
1987-09-29
Willis, Davis L.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
250201, 364525, G01B 902
Patent
active
046965734
ABSTRACT:
A wavefront of light is focused upon a first shearing interferometer having a relatively large shear and small dynamic range and a relatively minor portion of the light is focused upon a second shearing interferometer having a relatively small shear but large dynamic range. Owing to the limited dynamic range of the first shearing interferometer a plurality of a plurality of virtual candidate measurements are manifest which are compared with the temporally and/or spatially averaged values of each measurement produced by the second shearing interferometer and the closest match is employed to obtain a highly accurate unambiguous reading of the wavefront slope measurements.
REFERENCES:
patent: 3829219 (1974-08-01), Wyant
patent: 3921080 (1975-11-01), Hardy
patent: 3923400 (1975-12-01), Hardy
patent: 4141652 (1979-02-01), Feinleib
patent: 4518854 (1985-05-01), Hutchin
Itek Corporation
Koren Matthew W.
Rotella Robert F.
Wallach Michael H.
Willis Davis L.
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