Dual sensor assemblies for positional output feedback

Details Dual sensor assemblies for positional output feedback Dual sensor assemblies for positional output feedback

2007-10-09

2007-10-09

Barlow, John (Department: 2863)

Data processing: measuring, calibrating, or testing

Measurement system

Orientation or position

C360S073030, C360S097020, C360S069000, C360S071000, C360S075000

Reexamination Certificate

active

10933992

ABSTRACT:
A system for precisely determining a position with resolution on the order of nanometers or sub-nanometers is described. In particular, a system is described that utilizes a first and a second sensor assembly to determine a position of a movable element over a distance many times the capable range of operation of either of the individual sensor assemblies. The two sensor assemblies leap-frog one another in an incremental fashion to ensure that at least one of the sensor assemblies is always within it operational range. Positional signals generated by one of the sensor assemblies can be used to calibrate the other sensor assembly, following an adjustment of the other sensor assembly. The described invention may be implemented in an optical storage disk mastering system to determine the position of mastering optics as the mastering optics translate over the surface of a storage master disk.

REFERENCES:
patent: 6067203 (2000-05-01), Ottesen et al.
patent: 6352399 (2002-03-01), Martin et al.

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