Dual probe interferometer for object profile measuring

Details Dual probe interferometer for object profile measuring Dual probe interferometer for object profile measuring

1980-10-06

1982-08-31

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

356358, G01N 2186

Patent

active

043474411

ABSTRACT:
An apparatus is described for accurately measuring the profile on an object. The apparatus comprises two probes for simultaneously scanning the object to be measured and the reference object, the objects being rotatable about the same axis. Each of the probes is provided with a reflecting element, which are respectively incorporated in the measuring arm and reference arm of an interferometer.

REFERENCES:
patent: 4043671 (1977-08-01), Goodwin
patent: 4153370 (1979-05-01), Corey
patent: 4276480 (1981-06-01), Watson

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