Dual pressure sensor

Measuring and testing – Fluid pressure gauge – Diaphragm

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Details

73724, 361283, G01L 912

Patent

active

041776801

ABSTRACT:
A variable capacitance dual pressure sensor for sensing the pressure levels of a pair of fluids independently comprises an enclosure having a top wall and a bottom wall, and a substrate of dielectric material having a first major surface facing the top wall and a second major surface facing the bottom wall. A first electrode is affixed to a portion of the first major surface and a second electrode is affixed to a portion of the second major surface. A first flexible electrically conductive diaphragm is sealed to the first major surface of the substrate and is spaced from the first electrode to form therewith the plates of a first capacitor and a second flexible electrically conductive diaphragm is sealed to the second major surface of the substrate and is spaced from the second electrode to form therewith the plates of a second capacitor. The first and second diaphragms are electrically coupled together to form a common connection. The substrate is sealably mounted within the enclosure forming therewith a first chamber external to the first diaphragm for receiving a first fluid and a second chamber external to the second diaphragm for receiving a second fluid.

REFERENCES:
patent: 3808480 (1974-04-01), Johnston
patent: 3965746 (1976-06-01), Rabek
patent: 4040118 (1977-08-01), Johnston

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