Dual polarization interferometers for measuring opposite...

Details Dual polarization interferometers for measuring opposite... Dual polarization interferometers for measuring opposite...

2007-03-23

2008-12-30

Turner, Samuel A (Department: 2877)

Optics: measuring and testing

By light interference

Having polarization

C356S503000, C356S514000

Reexamination Certificate

active

07471396

ABSTRACT:
An optical interferometer (100) includes a first optical interferometer (200) disposed on a front surface side of a workpiece (W) and a second optical interferometer (300) disposed on a rear surface side of the workpiece (W). The first optical interferometer (200) and the second optical interferometer (300) each include a light emitting section (210, 310), a wire grid (220, 320) and an interference fringe sensor (230, 330). Wire alignment directions of the wire grid (220) of the first optical interferometer (200) and the wire grid (320) of the second optical interferometer (300) are orthogonal to each other. When no workpiece (W) is set, the wire grid (220) of the first optical interferometer (200) reflects light from the second optical interferometer (300) to generate object light and the wire grid (320) of the second optical interferometer (300) reflects light from the first optical interferometer (200) to generate object light.

REFERENCES:
patent: 5995226 (1999-11-01), Abe et al.
patent: 6504615 (2003-01-01), Abe et al.
patent: 6710883 (2004-03-01), Yoshizumi et al.
patent: 6822745 (2004-11-01), De Groot et al.
patent: 6847458 (2005-01-01), Freischlad et al.
patent: 7239397 (2007-07-01), Badami et al.
patent: 7268887 (2007-09-01), Kulawiec et al.
patent: 7426039 (2008-09-01), Badami et al.
patent: 2005/0128587 (2005-06-01), Suganuma
patent: 1 460 374 (2004-09-01), None
patent: A 8-035883 (1996-02-01), None
patent: A 2001-033215 (2001-02-01), None

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