Dual plate holographic imaging technique and masks

Details Dual plate holographic imaging technique and masks Dual plate holographic imaging technique and masks

1994-11-02

1997-04-29

Dzierzynski, Paul M.

Optical: systems and elements

Holographic system or element

Having optical element between object and recording medium

359 15, 359 9, 359900, 378 34, G03H 100, G03H 108, G02B 532, G21K 500

Patent

active

056254717

ABSTRACT:
In a system of proximity printing utilizing coherent light, a technique of phase only image correction is disclosed. Specifically, a holographic corrector plate is utilized. The image on the holographic corrector plate is produced by constructing a holographic image from the broadcast image and the intended working image. The broadcast image and the intended working image are placed in precise proximity printing alignment. With the respective images aligned, a coherent light beam is split to provide two temporally and spatially coherent beams. One of the temporally and spatially coherent beams scans the broadcast image. The other temporally and spatially coherent beam scans a mask containing the intended working image in a corresponding scan. A plane of beam intersection is chosen, with precise correspondence between rays at any point on the broadcast mask to rays from corresponding points on the working image mask. A hologram is produced at the plane of beam intersection with simultaneous and interfering scans at the plane of beam intersection. This hologram is then placed in a conventional proximity projection systems at the point of hologram production from broadcast mask to workpiece. The hologram has the effect of correcting the proximity image of the broadcast mask for the effects of diffraction and other optical artifacts, resulting in a corrected working image at the workpiece. Hologram production both on an analog basis and by synthetic means, such as a computer generated hologram basis is disclosed.

REFERENCES:
patent: 3630593 (1971-12-01), Bartelt
patent: 3652144 (1972-03-01), Lugt
patent: 3664721 (1972-05-01), Roberts
patent: 4095875 (1978-06-01), Lee et al.
patent: 4945551 (1990-07-01), Makabe et al.

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