Dual plate gas assisted heater module

Details Dual plate gas assisted heater module Dual plate gas assisted heater module

1998-05-26

2000-06-27

Bueker, Richard

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

118719, B65G 2500

Patent

active

060799285

ABSTRACT:
A dual plate gas assisted heater module having a vertically movable poppet movable between an upper and a lower subchamber has a passive heating feature which preheats a substrate prior to introducing it into a subchamber for active heating.

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