Dual-phase virtual metrology method

Details Dual-phase virtual metrology method Dual-phase virtual metrology method

2007-07-18

2009-10-13

Holmes, Michael B (Department: 2129)

Data processing: artificial intelligence

Neural network

Reexamination Certificate

active

07603328

ABSTRACT:
A dual-phase virtual metrology method is disclosed for considering both promptness and accuracy by generating dual-phase virtual metrology (VM) values, wherein a Phase-I conjecture step emphasizes promptness by immediately calculating the Phase-I virtual metrology value (VMI) of a workpiece once the entire process data of the workpiece are completely collected; and a Phase-II conjecture step intensifies accuracy, which does not re-calculate the Phase-II virtual metrology values (VMII) of all the workpieces in the cassette until an actual metrology value (required for tuning or re-training purposes) of a selected workpiece in the same cassette is collected. Besides, the accompanying reliance index (RI) and global similarity index (GSI) of each VMIand VMIIare also generated.

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