Dual para-xylylene layers for an X-ray detector

Details Dual para-xylylene layers for an X-ray detector Dual para-xylylene layers for an X-ray detector

2006-05-30

2006-05-30

Gabor, Otilia (Department: 2884)

Radiant energy

Invisible radiant energy responsive electric signalling

Semiconductor system

C250S370090, C250S367000, C250S483100

Reexamination Certificate

active

07053381

ABSTRACT:
The present invention provides an X-ray detector assembly and a fabrication method, where the X-ray detector assembly includes a scintillator material disposed on a detector matrix array disposed on a detector substrate; and an encapsulating coating disposed on the scintillator material. The encapsulating coating includes a combination of a mono-chloro-poly-para-xylylene layer and a poly-para-xylylene layer. In one embodiment, a poly-para-xylylene layer is disposed over the scintillator material and a mono-chloro-poly-para-xylylene layer is disposed over the poly-para-xylylene layer.

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