Optics: measuring and testing – By particle light scattering – With photocell detection
Patent
1995-04-06
1996-01-16
Turner, Samuel A.
Optics: measuring and testing
By particle light scattering
With photocell detection
356351, 2503411, G01B 902
Patent
active
054852714
ABSTRACT:
The invention relates to an infrared ellipsometer intended to take measurements of a sample (1). An exciter group (3) of the ellipsometer includes a source (101), a Michelson interferometer (103), a polarizer (105), and an optical device (107) to align the source (101) and the sample (1). An analysis group (7) has a polarizer-analyzer (701), a detector (703), and an optical device (705) for aligning the sample (1) and the detector (703). This infrared ellipsometer also incorporates a phase modulator (8). An electronic devices (9) controls the modulator (8) and the Michelson interferometer (103), and receives the signal produced by the detector (703).
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Poparization Modulation Fourier Transform Infrared Ellipsometry of Thin Polymer Films; R. T. Graf, F. Eng. J. L. Koenig, and H. Ishida; Applied Spectroscopy; vol. 40, No. 4, 1986; pp. 498-503.
Biosca Adolfo C.
Drevillon Bernard
Centre National de la Recherche Scientifique
Turner Samuel A.
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