Dual-modulation interferometric ellipsometer

Optics: measuring and testing – By particle light scattering – With photocell detection

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356351, 2503411, G01B 902

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active

054852714

ABSTRACT:
The invention relates to an infrared ellipsometer intended to take measurements of a sample (1). An exciter group (3) of the ellipsometer includes a source (101), a Michelson interferometer (103), a polarizer (105), and an optical device (107) to align the source (101) and the sample (1). An analysis group (7) has a polarizer-analyzer (701), a detector (703), and an optical device (705) for aligning the sample (1) and the detector (703). This infrared ellipsometer also incorporates a phase modulator (8). An electronic devices (9) controls the modulator (8) and the Michelson interferometer (103), and receives the signal produced by the detector (703).

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patent: 5196903 (1993-03-01), Masutani
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B. Drevillon et al., "Fast Polarization Modulated Ellipsometer Using a microprocessor system for digital Fourier Analysis", Review of Scientific Instruments, vol. 53, No. 7, Jul. 1982, New York, New York, pp. 969-977.
Poparization Modulation Fourier Transform Infrared Ellipsometry of Thin Polymer Films; R. T. Graf, F. Eng. J. L. Koenig, and H. Ishida; Applied Spectroscopy; vol. 40, No. 4, 1986; pp. 498-503.

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