Dual mode illumination system for optical inspection

Optics: measuring and testing – Inspection of flaws or impurities – Having predetermined light transmission regions

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356384, 356136, 356378, G01N 2100

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056107102

ABSTRACT:
A dual mode illumination system for optical inspection of products for surface defects and defects in holes in the product includes a first light source for providing illumination along an axis of one or more holes in the product to be inspected, the first light source being positioned on a first side of the product, a second light source providing illumination of the surface of the second side of the product to be inspected, a beam splitter for redirecting light from the second light source to a light sensor while passing light from the first light source to the light sensor. The second light source may be located adjacent to a second side of the product to be tested with the axis of illumination parallel to a major plane of the product. The light sensor may be a video camera connected to a data processing and display system.

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U.S. patent application Ser. No. 08/117,582 filed Sep. 2, 1993.

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