Dual loading port semiconductor processing equipment

Details Dual loading port semiconductor processing equipment Dual loading port semiconductor processing equipment

2010-03-15

2011-12-13

Fox, Charles A (Department: 3652)

Material or article handling

Apparatus for moving material between zones having different...

C414S940000, C414S810000

Reissue Patent

active

RE043023

ABSTRACT:
A substrate processing equipment comprises two pod supporting stages and two independently operable pod door openers. Each pod supporting stage is capable of placing thereon a pod for containing substrates therein. Each pod door openers having means for permitting access to the substrates inside the pod placed on a corresponding pod supporting stage.

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