Optics: measuring and testing – Of light reflection – By comparison
Patent
1997-03-15
1999-05-18
Kim, Robert
Optics: measuring and testing
Of light reflection
By comparison
324752, G01R31/265
Patent
active
059055774
ABSTRACT:
A probe beam is used to sample the waveform on an IC device under test (DUT) during each cycle of a test pattern applied to the DUT. A reference laser beam is also used to sample the DUT. For each cycle of the test pattern, the reference and probe beams sample the DUT at the same physical location, but at displaced times with respect to each other. Each reference measurement is made at a fixed time relative to the test pattern while the probe measurements are scanned through the test-pattern time portion of interest, in the manner normal to equivalent time sampling, to reconstruct the waveform. For each test cycle, the ratio of these two measurements is taken. The fluctuations of these ratios due to noise is greatly reduced as compared to fluctuations of the probe measurements taken alone. Thus, a smaller number of averages is required to reconstruct the waveform.
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H. Heinrich et al., Picosecond, backside optical detection of internal signals in flip-chip mounted silicon VLSI Circuits, 3RD European Conference on Electron and Optical Beam Testing of Integrated Circuits, Sep. 9-11, 1991, Como, Italy, pp. 261-274.
N. Seliger et al., A Study of Backside Laser-Probe Signals in MOSFETs, 5TH European Conference on Electron and Optical Beam Testing of Electronic Devices: Preliminary Proceedings, Aug. 27-30, 1995, Wuppertal, Germany, 8 pages.
M. Shinagawa et al., A Novel High-Impedance Probe for Multi-Gigahertz Signal Measurement, IEEE Transactions on Instrumentation and Measurement, vol. 45, No. 2, Apr. 1996, pp. 575-579.
Lo William K.
Rajan Suresh N.
Wilsher Kenneth R.
Kim Robert
Riter Bruce D.
Schlumberger Technologies Inc.
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