Radiant energy – Ion generation – Field ionization type
Patent
1997-05-27
1998-09-15
Nguyen, Kiet T.
Radiant energy
Ion generation
Field ionization type
250427, 250283, H01J 3934
Patent
active
058083081
ABSTRACT:
A dual beam ion source comprises an ion volume in an ion chamber, an ion collector, and two identical ion accelerators. One ion accelerator accelerates a first, "test" ion stream from the ion volume in a first direction and directs it to the ion collector where it can be directly measured. The second ion accelerator accelerates a second, "utilizable" ion stream from the ion volume in a second direction. By directly measuring the ion current (caused by the first, "test" ion stream) at the ion collector, either or both the total ion pressure of the gas within the ion volume, and the magnitude of the second, "utilizable" ion stream, can be calculated.
REFERENCES:
patent: 3307033 (1967-02-01), Vestal
patent: 3392280 (1968-07-01), Friedman et al.
patent: 3405263 (1968-10-01), Wanless et al.
patent: 3602709 (1971-08-01), Hull
patent: 3796872 (1974-03-01), Merren
patent: 3831026 (1974-08-01), Powers
patent: 3849656 (1974-11-01), Wallington
patent: 3924124 (1975-12-01), Favre et al.
patent: 3974380 (1976-08-01), Rettinghaus et al.
patent: 3984692 (1976-10-01), Arsenault
patent: 4068122 (1978-01-01), Schmidt et al.
patent: 4507555 (1985-03-01), Chang
patent: 4620095 (1986-10-01), Miziolek
patent: 5153432 (1992-10-01), Devant et al.
patent: 5412207 (1995-05-01), Micco et al.
Leybold Inficon Inc.
Nguyen Kiet T.
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