Dual ion beam ballistic alloying process

Details Dual ion beam ballistic alloying process Dual ion beam ballistic alloying process

1990-12-17

1991-10-08

Beck, Shrive

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

427 35, 427309, 427249, 24019211, 24029804, 423446, B05D 306, C23C 1400

Patent

active

050553186

ABSTRACT:
The invention relates to a low temperature, dual beam vacuum deposition process for forming a hard, stress reduced, ballistically alloyed film such as diamond onto a substrate.

REFERENCES:
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patent: 4844785 (1989-07-01), Kitabatake et al.
Weissmantel, "Ion Beam Deposition of Special Film Structures", J. Vac. Sci. Technol., vol. 18, No. 2, Mar. 1981, pp. 179-185.

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