Dual interferometer measuring system including a wavelength corr

Details Dual interferometer measuring system including a wavelength corr Dual interferometer measuring system including a wavelength corr

1993-07-12

1995-02-21

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356349, G01B 902

Patent

active

053921208

ABSTRACT:
A laser interferometer apparatus is designed such that the path of the laser beam of an interference refractometer to the path of the laser beam of a measuring interferometer is covered with a blast duct temperature-controlled atmospheric gas blown by a blower fan is directed through the interior of the blast duct toward the corner cube of a moving stage along the laser beam.

REFERENCES:
patent: 4215938 (1980-08-01), Farrand et al.
patent: 4814625 (1989-03-01), Yabu
patent: 4984898 (1991-01-01), Hofler et al.
patent: 5141318 (1992-08-01), Miyazaki et al.
patent: 5146284 (1992-09-01), Tabarelli et al.

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