Dual interferometer apparatus compensating for environmental tur

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer

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356361, G01B 902

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active

055859224

ABSTRACT:
In this invention, in order to realize an interferometer apparatus which can correct a measurement error caused by a change in refractive index due to a fluctuation of a gas such as air with high precision, and can assure a high-precision, stable measurement, first and second interferometer means are arranged, and two measurement reflection means are integrally moved while a predetermined relationship is held between measurement optical path lengths and reference optical path lengths formed by the two interferometer means.

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patent: 5404222 (1995-04-01), Lis

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