Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1995-09-22
1996-12-17
Gonzalez, Frank
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
356361, G01B 902
Patent
active
055859224
ABSTRACT:
In this invention, in order to realize an interferometer apparatus which can correct a measurement error caused by a change in refractive index due to a fluctuation of a gas such as air with high precision, and can assure a high-precision, stable measurement, first and second interferometer means are arranged, and two measurement reflection means are integrally moved while a predetermined relationship is held between measurement optical path lengths and reference optical path lengths formed by the two interferometer means.
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Eisenberg Jason D.
Gonzalez Frank
Nikon Corporation
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