Dual-imaging optical system

Details Dual-imaging optical system Dual-imaging optical system

1997-06-18

2000-12-05

Nguyen, Thong

Optical: systems and elements

Lens

With reflecting element

359364, 359365, 359727, 355 53, G02B 1708, G03B 2742

Patent

active

061574988

ABSTRACT:
An optical imaging system especially for microlithography includes a first imaging system forming an intermediate image of an object, and a second imaging system forming, on a surface, an image of the intermediate image. A reflective surface directs light from the first imaging system to the second imaging system. An aspherical corrective optical surface is located at or near the location of the intermediate image for correcting aberrations such as high-order distortion, aberrations due to accumulation of manufacturing tolerances, and spherical aberration. The first imaging system comprises a positive power refractive element and a concave mirror. The second imaging system comprises refractive elements and no concave mirror.

REFERENCES:
patent: 4367010 (1983-01-01), Broome
patent: 4779966 (1988-10-01), Friedman
patent: 4906078 (1990-03-01), Inabata et al.
patent: 5031976 (1991-07-01), Shafer
patent: 5153772 (1992-10-01), Kathman et al.
patent: 5212593 (1993-05-01), Williamson et al.
patent: 5287218 (1994-02-01), Chen
patent: 5323263 (1994-06-01), Schoemakers
patent: 5668673 (1997-09-01), Suenaga et al.
patent: 5691802 (1997-11-01), Takahashi
patent: 5694241 (1997-12-01), Ishiyama et al.
patent: 5805334 (1998-09-01), Takahashi

Affiliated with

Also associated with

Rating

Dual-imaging optical system does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Dual-imaging optical system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Dual-imaging optical system will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-966685