Dual ID verification system and switching method therefor

Details Dual ID verification system and switching method therefor Dual ID verification system and switching method therefor

2006-07-18

2006-07-18

Le, Thien M. (Department: 2876)

Registers

Systems controlled by data bearing records

C235S376000

Reexamination Certificate

active

07077310

ABSTRACT:
A method for switch dual Id verification systems for installing another carrier ID system on an equipment installation complying with SEMI E87. A first identification access system has internally installed on an equipment installation on which a second identification access system is then installed. Both systems are switched using a control flow and a wafer carrier ID is obtained by the chosen verification system.

REFERENCES:
patent: 5265170 (1993-11-01), Hine et al.
patent: 6265684 (2001-07-01), Wu

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