Dual guide beam stage mechanism with yaw control

Details Dual guide beam stage mechanism with yaw control Dual guide beam stage mechanism with yaw control

1995-06-27

1998-06-02

Masih, Karen

Electricity: motive power systems

Positional servo systems

With particular motor control system responsive to the...

318 67, 318 38, 318135, 384 12, 269 55, G05B 1100

Patent

active

057605645

ABSTRACT:
A dual guide beam stage mechanism for accurate X-Y positioning for use e.g. in semiconductor processing equipment provides accurate planar motion and yaw control. Over-constraint between components in their relative motion is minimized by utilizing flexibly mounted air bearings at the connection between at least one of the moveable guide beams and its corresponding stationary guide, and between at least one of the guide beams and the adjacent stage itself. Thus stage yaw motion is provided by allowing yaw motion of one of the guide beams. Preloading provides enough constraint through the air bearings without over-constraining the moving components, thereby improving accuracy and also reducing the need for close manufacturing tolerances.

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